MEMS-based Pyroelectric Thermal Energy Scavenger

D. Sims
Oak Ridge National Laboratory, US

Keywords: energy, thermal, waste heat


A new type of microelectromechanical systems (MEMS) high-efficiency heat energy converter, or scavenger, has been developed by ORNL inventors. The device is based on temperature-cycled cantilever pyroelectric capacitors. The device converts thermal waste heat to electricity while simultaneously reducing cooling requirements.