Clean Technology 2011

Processing Electronic Materials from Aqueous Solutions (invited presentation)

W. Wang, A. Telecky, J.K. Stowers, D.L. Olynick, D.A. Keszler
Oregon State University, US

Keywords: oxides, aqueous solutions, nanoclusters

Abstract:

We have been studying and developing aqueous chemistries for the preparation of oxide films for electronic devices. New approaches have been developed for the synthesis of hydroxide nanoclusters that can readily be transformed into high-quality insulators and semiconductors. Techniques for preparation of the clusters as well as their use as precursors for fabricating electronic devices will be detailed. The hydroxide clusters have also been made sensitive to radiation, providing a new high-sensitivity approach to beam-directed assembly of inorganic nanostructures. Features smaller than 10 nm have been written with electron-beam exposures, and breakthrough resolution has been demonstrated with extreme ultra-violet (EUV) radiation. General principles governing the assembly chemistry and extensions to three-dimensional patterning will be considered. Altogether, the aqueous methods provide a new, green approach to electronics fabrication.
 

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